Flange fixed MRP
- Simple mounting
- All electronics outside chamber
- Adjustable length of ceramic tube
- Perfect for monitoring and control systems
Free positionable MRP
- Most flexible positioning
- Mounting wherever you want to: prevent shadowing
- Flexible cable to flange inside reactor
- Perfect for monitoring and control systems
Positioning mechanic MRP
- Spatial resolution of plasma parameters
- Protection of probe in flange possible
- Positioning system mounted outside vacuum chamber
- Perfect for research and development
Wall integrated planar MRP
- Probe is hidden for process
- No shadowing or disturbance of the process
- Positioning inside flange possible
- Perfect for monitoring and control systems