The Multipole Resonance Probe is currently under development. We are revising the main parts of the hardware: probe head, vacuum mechanics as well as electronics for signal generation and recording and software for data processing. Most important point: Currently we replace the commercial network analyzer.
If there is already a need for this development state, please feel free to contact us and we will discuss if we can fulfill your request! Below are our current designs.
Flange fixed MRP
- Simple mounting
- All electronics outside chamber
- Adjustable length of ceramic tube
- Perfect for monitoring and control systems
Free positionable MRP
- ost flexible positioning
- Mounting wherever you want to: prevent shadowing
- Flexible cable to flange inside reactor
- Perfect for monitoring and control systems
Positioning mechanics MRP
- Spatial resolution of plasma parameters
- Protection of probe in flange possible
- Positioning system mounted outside vacuum chamber
- Perfect for research and development
Wall integrated planar MRP
- Probe is hidden for process
- No shadowing or disturbance of the process
- Positioning inside flange possible
- Perfect for monitoring and control systems