The Multipole Resonance Probe is currently under development. We are revising the main parts of the hardware: probe head, vacuum mechanics as well as electronics for signal generation and recording and software for data processing.

If there is need, please feel free to contact us and we will discuss if we can fulfill your request! Below are our current designs.

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Flange fixed MRP

  • Simple mounting
  • All electronics outside chamber
  • Adjustable length of ceramic tube
  • Perfect for monitoring and control systems

Free positionable MRP

  • ost flexible positioning
  • Mounting wherever you want to: prevent shadowing
  • Flexible cable to flange inside reactor
  • Perfect for monitoring and control systems

Positioning mechanics MRP

  • Spatial resolution of plasma parameters
  • Protection of probe in flange possible
  • Positioning system mounted outside vacuum chamber
  • Perfect for research and development

Wall integrated planar MRP

  • Probe is hidden for process
  • No shadowing or disturbance of the process
  • Positioning inside flange possible
  • Perfect for monitoring and control systems