Project

House of Plasma – Advanced Plasma Sensors

EXPERIENCE – HISTORY OF THE MRP

The Multipole Resonance Probe was developed at the Ruhr University Bochum. More than 10 PhD theses and over 30 publications proof the experience about the MRP in Bochum. In the frame of two projects funded by the German federal ministry of education and research the proof of principle and concept was demonstrated in industrial production processes. It was also possible to build up control systems, for instance in reactive sputtering to stabilize the process in a working area with high deposition rates and similar high quality film paramaters.

FUNDED PROJECT

In July 2020 we started our sponsored spin-off project. The Northrine-Westfalia ministry of economy, innovation, digitalisation and energy decided to enable our project funding at the Ruhr University Bochum. It is in the frame of the European Regional Development Fund to invest into the future of regions with transition processes.